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Evatec / Oerlikon Balzers LLS EVO Sputtering System

Asset #: 12028

Make: Evatec / Oerlikon Balzers

Model: LLS EVO

Last Confirm Date: November 30, 2016

Evatec / Oerlikon Balzers LLS EVO Sputtering System
V10 R20 WWIF - Version: 1.8.0.0.
GemBox - Version: 1.9.0.0.
Win 7 Upgrade (Retrofit) am 9.7.2013 Raid System
MFC: UNIT 200sccm AR 20sccm N@
RF Etching Device
RGA Pfeiffer
AE Pinnacle 12 KW MN: 3152415-119A
PFG 1600RF
Edwards IQDP 80 + QMB 500
Polycold 552HC
2 x CTI Cryo Pumps 8 F On Board
CTI 9600 Compressor
Grey Room Operation Panel
2000 Vintage

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