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Veeco E 400 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)

Asset #: 11818

Make: Veeco

Model: E 400

Last Confirm Date: October 15, 2018

Veeco E 400 MOCVD Reactor (Metal Organic Chemical Vapor Deposition)
Water requirement - 14GPM at 18℃
Electricity requirement - 3ψ380V 150A
Gas requirement - PH2:60PSIG[4.14BARS] PN2:30PSIG[2.07BARS] N2
House Feed:20PSIG[1.38BARS] N2 or CDA:80~100PSIG[6.92BARS]
Exhaust requirement- Exhaust1:1000CFM[1699CMH] Exhaust2:500CFM[549.5CMH]
Maximum yield- 2" *43pcs                 3" *19pcs                       4" *12pcs                6" *5pcs
Hydride Source Line:
Normal *6
Dopant *2
MO Source Line:
Normal *7
Dopant *2
Computer:
EPIVIEW *1
2000 Vintage

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