{"product_id":"11356","title":"Aixtron G 4 HT Reactor","description":"Aixtron G 4 HT Reactor\u003cbr\u003e6x6\"\u003cbr\u003eAixact Software-Version:\t6.1.6.8\u003cbr\u003eNumber of MO:\t12 possible, 7 active (TMGa, TMAl, TMIn, TEOS, CBr4, Cp2Mg, TEGa incl. MFC\/PC etc.)\u003cbr\u003eDopant lines:\tDouble dilution\u003cbr\u003ePumps:\t\u003cbr\u003eProcess Pump: Ebara A70W \t\u003cbr\u003eGlovebox Pump: Varian Triscroll 300  \tDor-Pump Varian Triscroll 300\u003cbr\u003eInsitu:\tLaytec Epi TT\u003cbr\u003eH2 - Purifier:\tEntegris 2,8l\u003cbr\u003eN2 - Purifier:\tEntegris 2,8l\u003cbr\u003eNH3 - Purifier:\tEntegris 2,8l\u003cbr\u003eMFC - Manufacturer:\tBronkhorst  \u003cbr\u003eSpare parts:\t\u003cbr\u003etension disc *D169.1xt15* 6 x 6\" \u003cbr\u003ecover segment, inner ring 6 x 6\", Ra6-9 \t\u003cbr\u003esupporting ring, complete D187.1 t15 single r \t\u003cbr\u003eplate set 1 x 6, G4 55µm \u003cbr\u003ecover segment outer w\/o mark 6 x 6\" G4 \u003cbr\u003ecover segment outer with mark 6 x 6\" G4\u003cbr\u003edisc, planet 6 x 6\", D520, t19, single rot.\t\u003cbr\u003eceiling, G4HT, QTZ, D560 x t2.4, 2 hole,unbe  \t\u003cbr\u003e6-er plate set 1X6\" E062.5205.90.-02 \t\u003cbr\u003estar 6x6\", RA 6-8 µm, quartz glass\u003cbr\u003e2010 Vintage","brand":"Bridge Tronic Global","offers":[{"title":"Default Title","offer_id":44812385353918,"sku":"11356","price":0.0,"currency_code":"USD","in_stock":true}],"url":"https:\/\/www.bridgetronic.com\/products\/11356","provider":"Bridge Tronic Global","version":"1.0","type":"link"}