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Aixtron G 4 HT Reactor

Asset #: 11356

Make: Aixtron

Model: G 4 HT

Last Confirm Date: August 10, 2016

Aixtron G 4 HT Reactor
6x6"
Aixact Software-Version: 6.1.6.8
Number of MO: 12 possible, 7 active (TMGa, TMAl, TMIn, TEOS, CBr4, Cp2Mg, TEGa incl. MFC/PC etc.)
Dopant lines: Double dilution
Pumps:
Process Pump: Ebara A70W 
Glovebox Pump: Varian Triscroll 300   Dor-Pump Varian Triscroll 300
Insitu: Laytec Epi TT
H2 - Purifier: Entegris 2,8l
N2 - Purifier: Entegris 2,8l
NH3 - Purifier: Entegris 2,8l
MFC - Manufacturer: Bronkhorst  
Spare parts:
tension disc *D169.1xt15* 6 x 6"
cover segment, inner ring 6 x 6", Ra6-9
supporting ring, complete D187.1 t15 single r
plate set 1 x 6, G4 55µm
cover segment outer w/o mark 6 x 6" G4
cover segment outer with mark 6 x 6" G4
disc, planet 6 x 6", D520, t19, single rot.
ceiling, G4HT, QTZ, D560 x t2.4, 2 hole,unbe  
6-er plate set 1X6" E062.5205.90.-02 
star 6x6", RA 6-8 µm, quartz glass
2010 Vintage

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