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KLA Archer AIM+ Overlay System
KLA Archer AIM+ Overlay System
KLA Archer AIM+ Overlay System
KLA Archer AIM+ Overlay System

KLA Archer AIM+ Overlay System

Asset #: 11284

Make: KLA

Model: Archer AIM+

Wafer Sizes: 12 inch

KLA Archer AIM+ Overlay System, 12"
- Originally Archer XT+, upgraded to Archer AIM+ (2008)
- 300mm Dual FIMs Front-End
(2) Asyst 300mm FOUP load-ports
25-slot FOUP handling capability
- PRI Wafer Handling Robot
- Single Blade End Effecter (300mm)
- Cassette/Wafer Scanning module (mounted on wrist assembly)
- Brooks 300mm Pre-aligner
- HEPA Filtered Mini-Envi
- Network Ready: RJ45 (10BaseT), BNC, & AUI connections
- Software (OS): Windows NT
- Software (App): Archer 5.60.05.30200 SP3
- User Interface:
- Dell 1905FP High-Res LCD Monitor
- Keyboard / Mouse (Trackball)
- Drive: CD-Rom
- Mitsubishi P91D Video Printer
- EMO Button (Key lock/release)
- Power (US): 208VAC, 12.5A, 2-Phase, 3-Wire, Freq 50/60Hz
- Power (US): 230VAC, 11.3A, 1-Phase, 3-Wire, Freq 50/60Hz
2004 Vintage

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