Canon FPA 3000 i 4 Fine Pattern Aligner
Projection Optics:
- Projection Magnification: 5 : 1
- Exposure Light: i-Line (Hg-Lamp 2,0kW) (HBO 2001 W/CIELX #8983qM4)
- Numerical Aperture: 0,63
- Field Size: 22mm
Standard Illumination:
- Exposure Light: i-Line
- Light Source: Hg-Lamp 2,0kW
- Intensity: ~6.900 (Std.Ill.Mode 0,63/0,65)
- Uniformity: ~2,43% (Std.Ill.Mode 0,63/0,65)
Printing Performance:
- Resolution: 0,35µm
Wafer Alignment Performance:
- Lighting Source: BB + HeNe + iCal
Pellicle Frame: Pattern Side only Stand Off = 6.3mm? Yes
Standard Alignment Specification:
Reticle Particle Checker Specification: 6” PPC (PPC-40S6)
- Detection Resolution
- Glass Surface: 15µm
- Pellicle Surface: 20µm
- Detection Repeatability: >95%
Wafer:
- Size: Standard 8” ( 6” thru 8” SEMI Standard, JEIDA,Notch / Flat, Optional): 8” Standard Notch
- Throughput: >59wph (60 shot wafer)22mm ( 8” Wafer) N/A
- Throughput: >83wph (32shot wafer)22mm ( 6” Wafer) N/A
Environmental Chamber Specification:
- Chamber Type: TBW-CD-80
- Air Conditioner: N/A
- Refrigerant: R422D (Umstellung auf R422D im Mai 2016)
1995 Vintage