KLA Tencor Surfscan SP 2 Wafer Inspection System

Asset # : 71448
Equipment Make: KLA-Tencor
Equipment Model: Surfscan SP 2
Type: Wafer Inspection System
Wafer Size: 12"
Equipment Configuration: - Process: BAREINSPSTANDARD Specifications:
- Windows System (XP SP3)
- Main S/W
- NGS 5.4 SR3 HF3
- Wafer: SEMI NotchCarrier:
-  3 AdvanTag SW CID, Phx, Shinko (load port)
-  8 user-configurable LEDs to display the load port status
- Load/unload button f
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  • Added: May 18, 2023

  • Views: 110

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