KLA Surfscan SP 2 Particle Defect System
- Process: BAREINSPSTANDARD Specifications:
- Windows System (XP SP3)
- Main S/W
- NGS 5.4 SR3 HF3
- Wafer: SEMI NotchCarrier:
-  3 AdvanTag SW CID, Phx, Shinko (load port)
-  8 user-configurable LEDs to display the load port status
- Load/unload button for manual delivery hand-off
- Cassette / wafer mapping which allows the tool to generate a wafer map of the 300 mm FOUP and detect wafer presence, empty slots and cross-slotted wafer. The wafer map can be displayed on the user screen and sent to a SECS
- host.Facilities:
- Power: 208 VAC, 3W-N
- CDA: > 28.3 Nl/min, > 6.6791 kg/cm2
- Vac: > 28.317 l/min, > -700 mm HgChambe:
- Powder Coat Panels Kit
- 200/300mm Vacuum option
- Optical Filter
- Load port,Vacuum 300 mm Dual FIMSApplication:
- 2 mm Edge Exclusion
- Oblique Incidence Illumination (High / Standard / Low)
- Normal Incidence Illumination (High / Standard / Low)
- Enhanced XY Coordinates
- IDM  SP2
- Standard Classification package
- LPD-N Classification
- LPD-ES classification
- Grading and Sorting
- Spatial Filter (20 degree)
- Spatial Filter (40 degree)
- Spatial filter (rough films)
- Spatial filter (Back)
- High Sensitivity Inspect Mode
- High Throughput Inspect ModeOptions:
- Haze
- Haze Normalization
- Haze Analysis
- IC/OEM Mfg Surf Quality RecipeHardware Configuration:
- 5 Color Light Tower (RGBYW)Ethernet:
- NFS Client
- E84 enabled for OHT & AGV/RGV
- E87 (Based on E39)
- GEM/SECS and HSMS
- E40/ E94/ E90 / E116Handler:
- Secondary UI, Phoenix, SP2Main Computer:
- IntelXeon CPU 3.20GHz
- 3.5 GB RAM Memory
- DVD- ROM
- Mouse
- Keyboard
- 3.5" Floppy
- NGS application softwareFEC Computer;
- IntelPentium4 CPU
- 512 MB RAM Memory- HDD not included
- damage/ missing part list
2006 Vintage