Hitachi S 8820 CD SEM
Asset # :
71319
Equipment Make:
Hitachi
Equipment Model:
S 8820
Type:
CD-SEM
Wafer Size:
6", 8"
Equipment Configuration:
- Principle of CD measurement: Cursor and line profile measurement
- CD measurement range : 0.1 to 10μm
- Measurement Repeatability: ± 1% or 0.005 μ m (3 sigma) (threshold method), whichever larger
- Throughput: 26 wafers/hour (in continuous measurement),
- CD measurement range : 0.1 to 10μm
- Measurement Repeatability: ± 1% or 0.005 μ m (3 sigma) (threshold method), whichever larger
- Throughput: 26 wafers/hour (in continuous measurement),
Equipment Pictures:
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Added: May 16, 2023
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Views: 230