Applied Materials Centura HTF EPI System

Asset # : 70545
Equipment Make: Applied Materials
Equipment Model: Centura HTF
Type: EPI System
Wafer Size:
Equipment Configuration: - 3 atmospheric epi chambers
- 1 cool down chamber
- Variable Speed Blower
- HP+ Robot
- Wide Body Loadlocks
- On-The-Fly Center Finder
- Accusett BMV system
- HSMS GEMSECS
- 2 mixed dopant supply lines
- TCS supply line
- Universal loadlock platform (20
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  • Added: April 11, 2023

  • Views: 298

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