Canon FPA 5510 IX Stepper
Asset # :
70444
Equipment Make:
Canon
Equipment Model:
FPA 5510 IX
Type:
Stepper
Wafer Size:
12"
Equipment Configuration:
- No hard disk
Some missing parts:
- OAS Scope
- SCH - 8 Robot
- SCH Cermaic Hand
- ALS ND 1
- ALS ND 2
- i-line Sub Filter
- Laser Head
- Indexer 1 & 2 (2ea)
- SCH-Z Unit
- PA Unit
- SH Unit
- RCS PCB
- Reticle Robot Hand
- Switching Regulator
Some missing parts:
- OAS Scope
- SCH - 8 Robot
- SCH Cermaic Hand
- ALS ND 1
- ALS ND 2
- i-line Sub Filter
- Laser Head
- Indexer 1 & 2 (2ea)
- SCH-Z Unit
- PA Unit
- SH Unit
- RCS PCB
- Reticle Robot Hand
- Switching Regulator
Equipment Pictures:
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Added: April 7, 2023
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Views: 153