Tel Unity 2 e 855 PP Etching System
Asset # :
69328
Equipment Make:
Tel
Equipment Model:
Unity 2 E 855 PP
Type:
Etcher
Wafer Size:
Equipment Configuration:
- SiO2/SiN
- 2 Chamber
- Gas: CHF3/CF4/O2
With Ebara pumps:
- 1 load lock
- 2 process chambers
- 1 platform
- 2 Chamber
- Gas: CHF3/CF4/O2
With Ebara pumps:
- 1 load lock
- 2 process chambers
- 1 platform
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Added: February 1, 2023
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Views: 72