Hitachi S 8800 CD SEM

Asset # : 68619
Equipment Make: Hitachi
Equipment Model: S 8800
Type: CD-SEM
Wafer Size:
Equipment Configuration: Known issues:
- Robot controller not working. Suspect issue with flash memory pcb.
- Beam quality - Image quality was grainy
- Intermittent issue with wafer loading from the notch alignment unit
- Needs a new tip installed
- HV controller pcb was remove
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  • Added: January 19, 2023

  • Views: 107

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