Applied Materials Centura HTF EPI system
Asset # :
68266
Equipment Make:
Applied Materials
Equipment Model:
Centura HTF
Type:
EPI
Wafer Size:
8"
Equipment Configuration:
‐ Centura 5200 HTF Toxic Epi mainframe
- 3 Channel
- 480V/60Hz/600A
- Wide Body ENP loadlocks
‐ Wafer mapping
‐ HP robot
‐ Remote Cent
- 3 Channel
- 480V/60Hz/600A
- Wide Body ENP loadlocks
‐ Wafer mapping
‐ HP robot
‐ Remote Cent
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Added: December 13, 2022
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Views: 419