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EVG 150 Automated Wafer Coater / Developer System

Asset #: 67677

Make: EVG

Model: 150

Wafer Sizes: 4, 6 inch

Last Confirm Date: October 17, 2022

EVG 150 Automated Wafer Coater / Developer System, 4", 6"
- Supplies three different resists and two developers
- Can load up to 25 wafers for batch coating and developing process
- Has spray-coating capabilities
- Automatic resist dispensing
- Controllable topside and bottom side Edge bead removal
- 4 hotplates and two chill plates for Soft and/or Hard baking
- A robot can load the wafers in to any of the coat, bake, chill and develop stations
Materials provided in EVG 150 include:
- 3 resists (SPRTM 700-1.0, SPRTM 220-3.0 and AZ4620)
- 2 developers (AZ300-MIF and CD-26)
Not working due to a computer issue

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