Hitachi S 4700 FE SEM

Asset # : 67673

Equipment Make: Hitachi

Equipment Model: S 4700

Type: FE-SEM

Wafer Size:

Equipment Configuration: Broken parts : Detector used for EDS (EOL detector)
(EDS specification)
- Aztec Live Standard Ultim40
- Detector: Ultim40 (Resolution127eV@MnKα, 40mm2 polymer window)
- Soft package Standard + Option (TruMap/ AutoLock (drift correction))
- Analyzer x4
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Equipment Pictures: