KLA Tencor UV 1050 Thin Film Measurement System

Asset # : 67521

Equipment Make: KLA-Tencor

Equipment Model: UV 1050

Type: Thin Film Measurement System

Wafer Size: 8"

Equipment Configuration: - Open cassette base (2)
- Operation interface: Trackball and keyboard standard
PC configuration:
- CPU: 66MHz
- Memory: 64M
- OS: Windows NT4.0 environment
- Application software: SUMMIT 2.3
- GEM/SECS: Enhanced SECSII
Facilities
- Vacuum: 20” (510 mm)

Equipment Pictures: