Canon FPA 3000 i 4 Stepper Sold
Asset # :
67250
Equipment Make:
Canon
Equipment Model:
FPA 3000 i 4
Type:
Stepper
Wafer Size:
8"
Equipment Configuration:
- 6” Reticle / t= 0,25” / Nikon Type Reticle Changer
- Stage Type: ABS
- Chamber Type: TBW-CD-80 (Compact Chamber Model)
- Reticle Plate Size: 6” x 6”
Projection Optics:
- Projection Magnification: 5 : 1
- Exposure Light: i-Line (Hg-Lamp 2,0kW)
- Numerica
- Stage Type: ABS
- Chamber Type: TBW-CD-80 (Compact Chamber Model)
- Reticle Plate Size: 6” x 6”
Projection Optics:
- Projection Magnification: 5 : 1
- Exposure Light: i-Line (Hg-Lamp 2,0kW)
- Numerica
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Added: September 12, 2022
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Views: 222