Hitachi S 9360 CD SEM

Asset # : 67216

Equipment Make: Hitachi

Equipment Model: S 9360

Type: CD SEM

Wafer Size:

Equipment Configuration: - Lower Vacuum System working properly
- Main Laser Source and 5-Phase drivers are dead
- The main software startup monitor stops and could not complete the reboot
- Both AV-1 valve and the objective aperture assemblies are broken, but still not leaking
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Equipment Pictures: