Applied Materials Centura Etcher
Asset # :
66906
Equipment Make:
Applied Materials
Equipment Model:
Centura
Type:
Etcher
Wafer Size:
12"
Equipment Configuration:
- FI Ver.: 5.3
- FI Port: 3 port
- FI Robot: TBC
- PC: TBC
- Thickness Metrology: Nano 9010 integrated metrology (1000-00829)
- Xfer robot: VHP Ceramic Blade
- Ch-A: DPS Tsubasa
- Ch-B: DPS Advance Edge
- Ch-C: NA
- Ch-D: Axiom
Chamber-A: DPS Tsubasa
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- FI Port: 3 port
- FI Robot: TBC
- PC: TBC
- Thickness Metrology: Nano 9010 integrated metrology (1000-00829)
- Xfer robot: VHP Ceramic Blade
- Ch-A: DPS Tsubasa
- Ch-B: DPS Advance Edge
- Ch-C: NA
- Ch-D: Axiom
Chamber-A: DPS Tsubasa
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Equipment Pictures:
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Added: August 17, 2022
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Views: 169