Applied Materials P 5000 CVD System

Asset # : 66697
Equipment Make: Applied Materials
Equipment Model: P 5000
Type: CVD System
Wafer Size: 8"
Equipment Configuration:

Mark II
Chamber A: SACVD PSG
Chamber B: SACVD PSG
Chamber C: PE Silane
Chamber D: in-situ measurement Nova 840DStorage slot: 15
Ozonator: present chA / chB
Chiller: Neslab HX300
Heat Exchanger: Amat 0
Mini controller: CVD
RF generator: ENI OEM 12B (A/B/C)
PLIS box: PSG (TEOS/TEPO)

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  • Added: July 29, 2022

  • Views: 61

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