Filmetrics Profilm 3 D Optical Profiler

Asset # : 66169
Equipment Make: Filmetrics
Equipment Model: Profilm 3 D
Type: Optical Profiler
Wafer Size:
Equipment Configuration:

– WLI
– Autofocus
– 4 position turret
– 100mm x 100mm auto stage
– Profilm data acquisition and viewer software
– OBJ-10X-Mirau: 10x Nikon Mirau interferometric objective lens
– OBJ-50X-Mirau: 50x Nikon Mirau interferometric objective lens
– UPG-Stitching: Upgrade Profilm-AnalysisSoftware for stiching XY grid of images
– VibrationIsolation-Nano30: Active vibration isolation system – Accurion Nano 30
– Desktop-Mini: HP desktop mini PC, no monitor. Configured with FILMeasure, FILMapper, or Profilm
– 27″ computer monitor

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  • Added: July 11, 2022

  • Views: 8

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