Applied Materials Centura HTF

Asset # : 65684
Equipment Make: Applied Materials
Equipment Model: Centura HTF
Type:
Wafer Size: 8"
Equipment Configuration:

– A chamber WCVD Cluster
– B chamber WCVD Cluster
– C chamber: Tungsten silicide  heated chamber with remote plasma clean system
– D chamber: Tungsten silicide lamp heated
– No heat exchanger
– No chiller

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  • Added: May 31, 2022

  • Views: 76

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