Applied Materials Centura HTF
Asset # :
65684
Equipment Make:
Applied Materials
Equipment Model:
Centura HTF
Type:
Wafer Size:
8"
Equipment Configuration:
– A chamber WCVD Cluster
– B chamber WCVD Cluster
– C chamber: Tungsten silicide heated chamber with remote plasma clean system
– D chamber: Tungsten silicide lamp heated
– No heat exchanger
– No chiller
Equipment Pictures:
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Added: May 31, 2022
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Views: 216