Nikon 1505 G 7 E Stepper

– R134 included
– (2) Carriers with (25) wafers
– Si-wafer with SEMI-flat
– 13-Slots
– Reticles: 90 mil
– Exposure field: 15-15 mm
– Reticle: 75 mm
– Integrator: 500 mW/cm²
– 436 nm (G-line)
– Reduction: 5x
– NA: ~0.54
– Coolant climate chamber: 21.0°C
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