STS / SPTS MACS ICPHR Etch System

Asset # : 65161
Equipment Make: STS / SPTS
Equipment Model: MACS ICPHR
Type: Etch System
Wafer Size: 6", 8"
Equipment Configuration:

– 1 Chamber
– 208 Volts, 60 Hz, 40 Amps

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  • Added: May 5, 2022

  • Views: 17

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