STS / SPTS MACS ICPHR Etch System
Asset # :
65161
Equipment Make:
SPTS / STS
Equipment Model:
MACS ICPHR
Type:
Etch System
Wafer Size:
6", 8"
Equipment Configuration:
– 1 Chamber
– 208 Volts, 60 Hz, 40 Amps
Equipment Pictures:
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Added: May 5, 2022
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Views: 100