KLA Tencor Sp 1 TBi Inspection System Sold
Asset # :
65013
Equipment Make:
KLA-Tencor
Equipment Model:
SP 1 TBI
Type:
Inspection System
Wafer Size:
Equipment Configuration:
– Cassette Load Lock Modules
– Includes 3 cassettes, a Motion Engineering Inc (MEI) 3 axis single arms robot, Leybold TMP/NT 150/360V/H turbo pump
– Desorb Modules
– Leybold TMP/NT 150/360V/H turbo pump
– Transport Modules Brooks MultiTran 5 Bi-symmet
Equipment Pictures:
Equipment Video:
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Added: April 20, 2022
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Views: 449