Applied Materials Precision 5000 Nitride Etch

Asset # : 64986
Equipment Make: Applied Materials
Equipment Model: Precision 5000
Type: Nitride Etch
Wafer Size: 8"
Equipment Configuration:

– MXP chamber lid on standard Mark 2 chamber (x4)
– with four Mark 2 etch chambers
– ESC clamping
– Software v.4.70
– CIM: SECS
– Robot with single blade
– 10 slot elevator
– Open cassette (x2)
– Mini controller for expanded gas panel
– 400 liter/sec Mag400 Lev Turbo (x4)- Electrostatic clamping
– Edwards QDP40 mech pump
– AMAT-0 heat exchanger
– Neslab HX150 heat exchanger
– Edwards WS151/QDP80 mech pump (x4)

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  • Added: April 18, 2022

  • Views: 37

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