Applied Materials Precision 5000 Nitride Etch Sold

Asset # : 64986

Equipment Make: Applied Materials

Equipment Model: P 5000

Type: Nitride Etch

Wafer Size: 8"

Equipment Configuration:

– MXP chamber lid on standard Mark 2 chamber (x4)
– with four Mark 2 etch chambers
– ESC clamping
– Software v.4.70
– CIM: SECS
– Robot with single blade
– 10 slot elevator
– Open cassette (x2)
– Mini controller for expanded gas panel
– 400 liter/sec Mag4

Equipment Pictures: