Varian CF 3000 Ion Implanter
Asset # :
64881
Equipment Make:
Varian
Equipment Model:
CF 3000
Type:
Ion Implanter
Wafer Size:
4"
Equipment Configuration:
– Gases: BF3, Phos & Ar
– B, Phos Implant Species
– 20-180 KeV
– 5.0 e14 Max dose
– 1.0 e10 Min dose
– Double charged
– One wafer at a time is processed but a full 25 wafer cassette can be loaded on the end station
Equipment Pictures:
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Added: April 12, 2022
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Views: 248