Varian CF 3000 Ion Implanter

Asset # : 64881
Equipment Make: Varian
Equipment Model: CF 3000
Type: Ion Implanter
Wafer Size: 4"
Equipment Configuration:

– Gases: BF3, Phos & Ar
– B, Phos Implant Species
– 20-180 KeV
– 5.0 e14 Max dose
– 1.0 e10 Min dose
– Double charged
– One wafer at a time is processed but a full 25 wafer cassette can be loaded on the end station

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  • Added: April 12, 2022

  • Views: 42

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