Varian E 500 EHPI Medium Current Implanter

Asset # : 64852
Equipment Make: Varian
Equipment Model: E 500 EHPI
Type: Medium Current Implanter
Wafer Size: 8"
Equipment Configuration:

– Top connection
– Extraction electrode: EHP
– Bushing: EHP
– Extraction PS
– Source magnet polarity switch
Gasbox:
– String 1: HP
– String 2: HP
– String 3: SDS
– String 4: SDS
Beamline:
– Two step reducer
– Gauss meter
– Terminal pneumatics
– Auto decel
– Total beamenergy probe
– Mirror PS
– Scan amplifier
– Setup cup amplifier
End Station:
– Chuck system: ESC
– Dose integrator
– DI temp monitor controller
– Platen tilt servo controller
– Scanning faraday controller
– E-flood controller
– Right elevator controller
– Left elevator controller
– Orienter controller
– Uniformity controller
– Gauge controller
– Right arm & left arm controller
– End station pneumatic interface
– Right handler & left handler pneumatic interfaces
Control System:
– Computer: Win 7
– Software: V15,11,12
– Light tower
High Vac Pumps:
– Source turbo: Pfeiffer TPH 1201 P
– Analyzer turbo: Pfeiffer TMH 261 Y P X
– Scanner turbo: Pfeiffer HiPace 700 P
– End station Cryo: Torr10 8018236
– Loadlock right: Cryo
– Loadlock left: Cryo
Dry Roughing Pumps:
– Differential seal: Varian scroll
Remote Facility Rack:
– Cryo comp
– Motor [INVALID]nator
– DI water pump

Equipment Pictures:

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  • Added: April 6, 2022

  • Views: 108

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