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Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter
Varian E 500 EHPI Medium Current Implanter

Varian E 500 EHPI Medium Current Implanter

Asset #: 64852

Make: Varian

Model: E 500 EHPI

Wafer Sizes: 8 inch

Last Confirm Date: April 06, 2022

Varian E 500 EHPI Medium Current Implanter, 8"
- Top connection
- Extraction electrode: EHP
- Bushing: EHP
- Extraction PS
- Source magnet polarity switch
Gasbox:
- String 1: HP
- String 2: HP
- String 3: SDS
- String 4: SDS
Beamline:
- Two step reducer
- Gauss meter
- Terminal pneumatics
- Auto decel
- Total beamenergy probe
- Mirror PS
- Scan amplifier
- Setup cup amplifier
End Station:
- Chuck system: ESC
- Dose integrator
- DI temp monitor controller
- Platen tilt servo controller
- Scanning faraday controller
- E-flood controller
- Right elevator controller
- Left elevator controller
- Orienter controller
- Uniformity controller
- Gauge controller
- Right arm & left arm controller
- End station pneumatic interface
- Right handler & left handler pneumatic interfaces
Control System:
- Computer: Win 7
- Software: V15,11,12
- Light tower
High Vac Pumps:
- Source turbo: Pfeiffer TPH 1201 P
- Analyzer turbo: Pfeiffer TMH 261 Y P X
- Scanner turbo: Pfeiffer HiPace 700 P
- End station Cryo: Torr10 8018236
- Loadlock right: Cryo
- Loadlock left: Cryo
Dry Roughing Pumps:
- Differential seal: Varian scroll
Remote Facility Rack:
- Cryo comp
- Motor [INVALID]nator
- DI water pump
2000 Vintage

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