Solid State Equipment Corporation / SSEC 300 ML Evergreen Series III Wafer and Mask Scrubber

Asset # : 64442
Equipment Make: Solid State Equipment Corporation / SSEC
Equipment Model: 300 ML Evergreen Series III
Type: Wafer and Mask Scrubber
Wafer Size:
Equipment Configuration:

– Operating system: Windows 7 Pro
– Software version: SSEC ver. 7.47.25
– Volts: 200-240V
– Amps: 20A
– Phase: 1
– Air pressure: 85-100 psi
– Unit powers on, can move brushes and pumps with maintenance software, when operating the main program the unit gets hung up with error “SENSOR Chamber Door Closed (Ch1DoorClsd)” while initializing

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  • Added: March 24, 2022

  • Views: 44

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