MRC–Physical Vapor Deposition (PVD)

Asset # : 63995
Equipment Make: MRC
Equipment Model:
Type: Physical Vapor Deposition (PVD)
Wafer Size: 6"
Equipment Configuration: - Hard etch - Cathode in Sputt 1, 2, 3: SPA-10 (x3) - Target in Sputt 1, 2, 3: AICu, AICu, AISiCu - DC Power Supply: MDX20
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  • Added: March 13, 2022

  • Views: 264

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