Lam 2300 Exelan Flex EX+ Chamber

Asset # : 63584
Equipment Make: Lam
Equipment Model: 2300 Exelan Flex EX+
Type: Chamber
Wafer Size: 12"
Equipment Configuration: Chamber type:Flex EX Plus Gas config.(sccm)=MFC full scale C4F8(50)/CF4(200)/O2(3000)/Ar(1000)/ CO(500)/CH3F(100)/O2(30)/CHF3(100)/ O2(300)/Xe(500)/C4F6(50)/CH2F2(100)/O2(10) Source 60MHz 2500W/27MHz 3000W/2MHz 8500W Lid Temp Control ~140? ESC Temp Contro
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  • Added: March 13, 2022

  • Views: 96

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