Axcelis NV GSD / 200 E Medium Current Ion Implanter Sold
Asset # :
62936
Equipment Make:
Axcelis
Equipment Model:
NV GSD 200 E
Type:
Medium Current Ion Implanter
Wafer Size:
8"
Equipment Configuration:
– Energy Range: 180KeV
– Software Version: 6.4.4
– Workstation: Main only
– Cell Controller: 177 partnr 11002540
– SECS/GEM: Sec Network Card
– Mechanical Frame: Bolted
– Filament P.S: EMS 10-60 – Lambda – P/N: 1214110
– Cathoden P.S: Lumina Power Inc – P
Equipment Pictures:
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Added: January 25, 2022
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Views: 407