Lam SEZ RST 304–

Asset # : 62821

Equipment Make: Lam

Equipment Model: SEZ RST 304

Type:

Wafer Size:

Equipment Configuration:

– Chuck STD
– Brooks ATM407 w Flip-Module
Medium1
– used for HF HouseSupply,
– able to mix DHF
– Mix-Tank,
– Buffer-Tank (10ml BP) for HF,
– PW for DI
– Single-Hex
Medium2
– used for DSP from CBM
– able to mix DHF
– NO Mixtank !
– Buffer.Tank (10ml) HF (n