Karl Suss MA 6 / BA 6 Aligner

– Topside (TSA) Alignment
– Backside (BSA) Alignment
– Suss DVM6 Microscope
– UV400 splitfield Optics (for 365nm and 405nm exposure)
– CIC 500 Power Supply
– Capable of Hard, Soft, Vacuum Contact with proper tooling
– 1500W Lamphouse
– Vibration Isolatio