Novellus Concept 3 Speed MAX Lite HDP CVD

Asset # : 62495
Equipment Make: Novellus
Equipment Model: Concept 3 Speed MAX Lite
Type: HDP CVD
Wafer Size: 12"
Equipment Configuration:

– Process: STI Oxide Dep2
– Software version: 5.73B39
– Power rating: 208 AC 3-phase
– Loading config: 3 load port
– Chm/Unit Position 1: CHA N2, AR, O2, He, SiH4, H2, NF3
– Chm/Unit Position 2: CHB N2, AR, O2, He, SiH4, H2, NF3
– Chm/Unit Position 3: CHC N2, AR, O2, He, SiH4, H2, NF3

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  • Added: December 20, 2021

  • Views: 31

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