Tel Unity 2 E

Asset # : 62471
Equipment Make: Tel
Equipment Model: Unity 2 E
Type:
Wafer Size: 8"
Equipment Configuration:

– 2 chamber silicon etch platform
– Software vs. 3.60rev206
– CIM: SECS
– Factory interface: open cassette
Hardware:
– Tool RF rack
– Scrubber: mystaire MTS-30C
– T/C and C/C pump – Ebara AIOS
– Chamber pump: Edwards iH80
– Chiller – SMC INR-499-213-X020
– Some missing/faulty parts

Equipment Pictures:

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  • Added: December 15, 2021

  • Views: 42

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