Tystar Mini Tytan 8300 Climate Chamber

Asset # : 62393
Equipment Make: Tystar
Equipment Model: Mini Tytan 8300
Type: Climate Chamber
Wafer Size: 8"
Equipment Configuration:

– Tubes up to: 3 tubes
– Wafers per tube:
– 200 ATM
– 100 LPCVD
– Flat Zone: 34″
– Tube 1: AP SiOX
– Tube 2: LP SiN
– Pump: Leybold DD105

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  • Added: December 3, 2021

  • Views: 41

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