Evatec BAP 801 E Beam Evaporator

Asset # : 62341
Equipment Make: Evatec
Equipment Model: BAP 801
Type: E-Beam Evaporator
Wafer Size:
Equipment Configuration:

– Plasma source missing
– Cryo Pumped
Power Supply:
– Triode Tube
– High Voltage Min: 6kV
– High Voltage Max: 10kV
– No. of Guns Controlled: 2
– Electron Source Type: Four Pocket
– Gas Inputs: 2
– Film Thickness Monitor
– Residual Gas Analyzer

Equipment Pictures:

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  • Added: December 1, 2021

  • Views: 23

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