Nikon NSR 2205 i 11 D Stepper

Asset # : 62241
Equipment Make: Nikon
Equipment Model: NSR-2205 i 11 D
Type: Stepper
Wafer Size: 8"
Equipment Configuration:

– Wafer type: flat
– Wafer loader type: Type II
– Carriers: left, right
– Chamber size: 1800 x 750 x 2450mm
– Chamber type: S09
– Rack 1: 650 x 650 x 1500mm
– Rack 2: 650 x 650 x 2200mm
– Monitor: LED
– with visual controller and visual converter
– Reticle size: 5″
– Reticle library: slot 14
– RA microscope: fix
– HP laser type: 5517B

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  • Added: November 23, 2021

  • Views: 42

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