Thermo Scientific Orion 2 Robotic Charged Device Model (CDM) Test System

Asset # : 62237
Equipment Make: Thermo Scientific
Equipment Model: Orion 2
Type: Robotic Charged Device Model (CDM) Test System
Wafer Size:
Equipment Configuration:

– Test Area: 10.16 cm x 10.16 cm (4 in x 4 in)
– Motion System:
– x,y axis: minimum step size 0.001 in with 0.00025-in accuracy (minimum step size 25.4 µm with 6-µm accuracy)
– z axis: vertical travel to 1.5 in with 0.00025-in accuracy (vertical travel to 38.1 mm with 6-µm accuracy)
– Test Voltage Range: ±25 V to ±2000 V (±1V steps)
– Temperature Range:
– Operating Temperature: +15°C to +30°C (+59°F to +86°F)
– Non-operating temperature: +4°C to +60°C (+40°F to +140°F)
– Humidity Range: 30-60% non-condensing
– Power Requirement: 110-240 VAC, 15A, 50/60 Hz
– Customer Supplied:
– Vacuum: ≥ 16” Hg
– Dry air / nitrogen: 0.25 scfm @ 60 psi max

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Ad Details

  • Added: November 22, 2021

  • Views: 15

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