Optical Coating Laboratory OCLI M 1044 Vacuum Coating System

Asset # : 62222

Equipment Make: Optical Coating Laboratory

Equipment Model: OCLI M 1044

Type: Vacuum Coating System

Wafer Size:

Equipment Configuration: - (4) PFEIFFER Turbo molecular pumps with power suppliers
- (2) ADVANCED ENERGY Pinnacle Ion gun, 12 kW
- (3) DC Engines
- (3) Drives
- (6) DC Power supplies: (3+3) Master - (20 kW) / Slave (10 kW)
- (2) MDX Sparc-LE 20, Si target: (1+1) Master / Slave
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Equipment Pictures: