Lam Rainbow 4520 i Oxide Etch Tool

Asset # : 62135
Equipment Make: Lam
Equipment Model: Rainbow 4520 i
Type: Oxide Etch Tool
Wafer Size: 6", 8"
Equipment Configuration:

– ESC Clamp system
– with Isotropic Etch Chamber
– Software Revision Level: E-1.5.2
– Monochromatic Endpoint
– Cassette to Cassette
– Chiller: Lam TCU 2080
– Accessories: Mainframe, Chiller, TCU, RF Cart
– Upgrade to VAT Throttle Valve

Equipment Pictures:

Send BTG Message:

Inquire

Ad Details

  • Added: November 11, 2021

  • Views: 65

Description

Tags :