AJA Orion 5 Magneto Sputter and RIE Sold
Asset # :
62099
Equipment Make:
AJA International
Equipment Model:
Orion 5
Type:
Magneto Sputter and RIE
Wafer Size:
Equipment Configuration:
– 3 sources that can apply power
– Loadlock
– Previously used various metal oxide targets such as IGZO and ITO
– Chiller
Equipment Pictures:
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Added: November 11, 2021
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Views: 90