Axcelis / Eaton NV 8200 P Implanter

Asset # : 62006
Equipment Make: Axcelis / Eaton
Equipment Model: NV 8200 P
Type: Implanter
Wafer Size: 8"
Equipment Configuration:

Dose 2 Block 3
– Energy Config: 0 – 250Kv Midcurrent
– CE-Conformity: Yes
– Cryo-Pumps: 3x CTI Onboard 8
– Cryo-Kompressor: CTI 9650 Low-Voltage
– Turbo-Pumps: Leybold: LH600C + LH1000C + LH151C
– Rough-Pumps: Edwards: ODP40 + QDP40 + IQDP80/QMB250
– Clamp-Type: E-Chuck with Non-μC Controller
– Wafer-Cooling: Galden HT110 with 20 degree Heatexchanger
– Gasbox: 3x Toxic 0,5L Size
– String1: Argon Carriergas; SEC-4400
– String2: BF3 SDS-Low-Pressure Type VCR 1/4″; Brooks
– String3: PH3 SDS-Low-Pressure Type VCR 1/4″; MKS1640
– String4: AsH3 SDS-Low-Pressure Type VCR 1/4″; MKS1640
– Beam-Profiler Type: Belt-Drive
– Gear-Type’s: Scan: Harmonic Tilt: Harmonic
– Source-Type: ELS4 IHC-Source without Vaporizer
– HV-Transformer: Mineral-Oil
– Light-Tower: red/yellow/green; no buzzer
– Main-Workstation: Solaris SUN AXI 4HE
– Second-Workstation: Solaris SUN Sparc5
– Software-Version: 5.1.4.1
– Network: 24port 100MB Ethernet with XXXXXX Router-Kit
– Cell-Controller: 177 Type
– Total missing parts: Lower Lock Plate(waiting spare part), clean room table; BF3-High-Pressure
Gauge; Chiller (only Heat exchanger)
– some minor modifications: Upper-Lock; Xfer-Arm; E-Shower Controller; Flow-Switch; Barcode-
Reader; ELS4-Source; Chiller
– Damages: transformer only – 200kv

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  • Added: November 1, 2021

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