Yes 6 HMDS Oven

Asset # : 61840

Equipment Make: Yes

Equipment Model: 6

Type: HMDS Oven

Wafer Size:

Equipment Configuration: - Microprocessor control of output with input monitoring
- Multi-programming capabilities
- Process interrupt indicator (‘ABORT’)
- Process indicator lights
- Cycle complete light and sonalert
- Electropolished 316 stainless steel chamber
- Internal chamb

Equipment Pictures: