Tel Trias Metal CVD

– Ti/TiN
– Configured for 4 chambers
Gas Supply Config
– Manual valve N*: Yes
– Regulator (N2-1/N2-2): Yes
– Regulator (N2-PF): Yes
– Regulator (Ar): Yes
– Pressure sensor (All gas line): No
– Filter (N2-PF): No
– Manual valve (Dry air line): Yes
– Filter