KLA Tencor AIT I Patterned Surface Defect Inspection System

Asset # : 61273
Equipment Make: KLA-Tencor
Equipment Model: AIT I
Type: Patterned Surface Defect Inspection System
Wafer Size:
Equipment Configuration: - KLA-Tencor AIT I Mainframe - Currently Configured for 6"/150mm & 8"/200mm Wafers - Double Darkfield Inspection Tool - SECS II/GEM Communication Interface - Low Contact Chuck (AIT I) - Multi Channel Collection Optics System with Independent Programmable
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Ad Details

  • Added: September 23, 2021

  • Views: 202

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