Tel Alpha 8 SE Z Chemical Vapor Deposition (CVD)

Asset # : 61189

Equipment Make: Tel

Equipment Model: Alpha 8 SE Z

Type: CVD

Wafer Size: 8"

Equipment Configuration:

– Process: Co-SiN Low Pressure
– Wafer Shape: Notch
– Wafer Cassette: 8″ Plastic Miraial
Furnace Body:
– Heater chamber (500~1000*C)
– Furnace stand
– Water cooling piping
– Scavenger
– Cable duct
Automatic Machine Related:
– Cassette I/O port
– Cassette

Equipment Pictures: